NON-CONTINUOUS BONDING OF SPUTTERING TARGET TO BACKING MATERIAL

摘要

A target assembly comprising - a support body having a carrying surface; - a sputtering target having an attaching surface, said carrying surface and said attaching surface being arranged in opposing facing relation to one another, thereby defining an intermediate space between said carrying surface and said attaching surface; and - a bonding material disposed in the intermediate space for binding said attaching surface to said carrying surface, - wherein distinct areas of one or both of said attaching surface and said carrying surface are selectively, superficially treated to enhance the bonding strength of said bonding material in said distinct areas.