| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a photoelectric composite substrate capable of constituting an optical waveguide by forming a core layer on a wiring substrate equipped with a connection pad with sufficient pattern accuracy. <P>SOLUTION: A method of manufacturing a photoelectric composite substrate includes steps of: forming a first clad layer 40 in an area except for a connection pad P on a wiring substrate 10 equipped with the connection pad P on an upper surface; forming a band-shaped core layer 50 on the first clad layer 40; and obtaining an optical waveguide L of a structure in which the core layer 50 is surrounded by the first clad layer 40 and a second clad layer 60 by forming the second clad layer 60 coating the core layer 50. The thickness of the first clad layer 40 is set to be the same as the thickness of the connection pad P, thereby resolving the level difference of the connection pad P. <P>COPYRIGHT: (C)2012,JPO&INPIT |
