TRANSDUCER FOR CONVERTING TEMPORAL TEMPERATURE CHANGE, ELECTRONIC CHIP CONTAINING THE SAME, AND METHOD FOR MANUFACTURING ELECTRONIC CHIP CONTAINING TRANSDUCER FOR CONVERTING TEMPORAL TEMPERATURE CHANGE

摘要

PROBLEM TO BE SOLVED: To provide a transducer for converting a temporal temperature change to a potential difference, having a sensitivity comparable to the sensitivity of conventional pyroelectric materials with a large pyroelectric coefficient and consisting of a pyroelectric material which can be easily manufactured using a microelectronic manufacturing method.

SOLUTION: A transducer includes: an upper electrode (40) which is conductive and placed opposite to an object of which a temporal temperature change is measured; a conductive bottom electrode (42); and a pyroelectric material layer (44) which is at least single-layered, and placed between the upper electrode (40) and the bottom electrode (42) to generate a potential difference in accordance with the temporal temperature change even when there is no mechanical external stress between the upper electrode and the bottom electrode. At least one layer of the pyroelectric material layer has a III-V nitride as its base.

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