| 摘要 |
PURPOSE: A temperature controlling apparatus is provided to have a less influence on temperature distribution in each area by preventing a temperature controlling function from being degraded due to a terminal. CONSTITUTION: A thermoelectric module independently controls a temperature by conducting a current through a terminal at a plurality of areas from the center of a stage to the outside. A terminal(45) is arranged in the heat exchanging plate electrode(42) of the thermoelectric module in an inner side except for the outmost area among four areas through an electrode extending portion(44). The electrode extending portion is arranged in a place where a temperature control electrode is arranged while being inserted in an adjacent thermoelectric element. A terminal is arranged in the outmost side of the thermoelectric module in the outmost area.
|
