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发明名称
ARC LAYER FOR SEMICONDUCTOR DEVICE
摘要
申请公布号
KR101085279(B1)
申请公布日期
2011.11.22
申请号
KR20057013929
申请日期
2004.01.23
申请人
发明人
分类号
H01L21/027;G03F;G03F7/09;H01L21/302;H01L21/4763;H01L23/48;H01L23/58
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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