| 摘要 |
<p>Disclosed are a shape measurement device and a shape measurement method, by which an object to be measured, having a three-dimensional shape that significantly exceeds the depth of field of a microscope can be efficiently subjected to shape measurement with high precision in a short time without moving the object to be measured, a microscope, or the like. Specifically disclosed is a shape measurement device (1) which is provided with a lighting device (30) for irradiating parallel light (R) to an object (100) to be measured, a microscope (40) having a large depth of field, which is arranged at a position facing the lighting device (30) so as to sandwich the object (100) to be measured in such a manner that the light axis of the parallel light and the light axis of the microscope itself coincide with each other, a camera (50) for capturing an image of the object (100) to be measured, which is magnified by the microscope (40) at resolution of 0.2-2 µm, and a holding device (20) for arranging the measurement part of the object (100) to be measured in the parallel light (R) in such a manner that the parallel light (R) reflects the outer peripheral shape of the measurement part of the object (100) to be measured.</p> |
