| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a heat treatment device for an object to be treated, capable of improving followability and stationary characteristic of control. <P>SOLUTION: This heat treatment device for an object to be treated includes: a heat treatment furnace 4 performing heat treatment on the treated object, a sequencer 10 outputting a plurality of set values and a plurality of control section selecting signals for controlling the heat treatment furnace, and a plurality of control system loops constituted to control a plurality of controlled variables of the heat treatment furnace, and each control system loop includes a plurality of control sections outputting manipulated variables on the basis of the set values from the sequencer and the controlled variables from the heat treatment furnace, and switches 3-1, 3-2, 3-3 selecting one of the manipulated variables output from the plurality of control sections according to the control section selecting signals from the sequencer 10, and outputting the same to the heat treatment furnace 4. The sequencer 10 has a means for independently switching control configurations of the plurality of control system loops. <P>COPYRIGHT: (C)2012,JPO&INPIT |
