发明名称 METHOD FOR MANUFACTURING SUBSTRATE WITH METAL PATTERN, AND SUBSTRATE WITH METAL LAMINATE
摘要 <P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a substrate with a metal pattern, which is capable of highly accurately processing the metal pattern by using laser light, capable of processing a metal thickness film by laser light of comparatively low power and allowed to be applied also to a flat panel display such as a plasma display, and to provide a substrate with a metal laminate. <P>SOLUTION: The method for manufacturing the substrate with the metal pattern, which forms a pattern of a metal layer 30 on a substrate 10 by using laser light includes: a process for preparing the substrate forming the metal layer on the surface; a process for forming an assist layer 40 composed of a metal material different from a material of the metal layer and having a light absorption rate to the laser light, which is different from that of the metal layer, on the metal layer to form a metal laminate 50 on the substrate; and a process for patterning the metal layer by irradiating the laminate with the laser light 81 and removing a laser light irradiation portion of the laminate to form the metal pattern. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2011233872(A) 申请公布日期 2011.11.17
申请号 JP20110083193 申请日期 2011.04.04
申请人 ASAHI GLASS CO LTD 发明人 GYU KOYO
分类号 H05K3/08;H01J9/02;H01J11/02;H01J11/22;H01J11/34;H05K3/00 主分类号 H05K3/08
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