Electrostatic actuation for management of flow in micro-total analysis systems (μ-TAS) and related method thereof

摘要

The present invention relates to microfluidic devices, and in particular, flow management in such devices. In particular, the present invention provides an electrostatic valve for flow manipulation in a microfluidic device. The valve of the present invention sits on a valve seat in a microchannel and deflects away from the valve seat by electrostatic actuation to assume an opened configuration to allow fluid flow.