发明名称 |
Membrane structure element and method for manufacturing same |
摘要 |
It is intended to provide a membrane structure element that can be easily manufactured, has an excellent insulating property and high quality; and a method for manufacturing the membrane structure element. The manufacturing method is for manufacturing a membrane structure element including a membrane formed of a silicon oxide film and a substrate which supports the membrane in a hollow state by supporting a part of a periphery of the membrane. The method includes: a film formation step of forming a heat-shrinkable silicon oxide film 13 on a surface of a silicon substrate 2 by plasma CVD method; a heat treatment step of performing a heat treatment to cause the thermal shrinkage of the silicon oxide film 13 formed on the substrate 1; and a removal step of removing a part of the substrate 2 in such a manner that a membrane-corresponding part of the silicon oxide film 13 is supported as a membrane in a hollow state with respect to the substrate 2 to form a recessed part 4. |
申请公布号 |
US8057882(B2) |
申请公布日期 |
2011.11.15 |
申请号 |
US20070225670 |
申请日期 |
2007.03.28 |
申请人 |
HIRANO TAKAYUKI;KAWAKAMI NOBUYUKI;KANNAKA MASATO;KOBE STEEL, LTD. |
发明人 |
HIRANO TAKAYUKI;KAWAKAMI NOBUYUKI;KANNAKA MASATO |
分类号 |
B32B3/00;G01F1/692;G01L9/08;G01P15/08 |
主分类号 |
B32B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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