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发明名称
STICKSTOFFPLASMA-OBERFLÄCHENBEHANDLUNG IN EINEM DIREKTBINDUNGSVERFAHREN
摘要
申请公布号
AT529891(T)
申请公布日期
2011.11.15
申请号
AT20090765984T
申请日期
2009.04.28
申请人
COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIESALTERNATIVES
发明人
MORICEAU, HUBERT;MORALES, CHRISTOPHE;RIEUTORD, FRANCOIS;VENTOSA, CAROLINE;CHEVOLLEAU, THIERRY
分类号
H01L21/762
主分类号
H01L21/762
代理机构
代理人
主权项
地址
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