VERFAHREN ZUR REDUZIERUNG DER OBERFLÄCHENDEFEKTE EINES RESISTMUSTERS UND ANWENDUNG EINER WÄSSRIGEN SAUREN LÖSUNG IN DIESEM VERFAHREN,申请号AT20010300869T-传众专利搜索

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发明名称	VERFAHREN ZUR REDUZIERUNG DER OBERFLÄCHENDEFEKTE EINES RESISTMUSTERS UND ANWENDUNG EINER WÄSSRIGEN SAUREN LÖSUNG IN DIESEM VERFAHREN
摘要
申请公布号	AT532107(T)	申请公布日期	2011.11.15
申请号	AT20010300869T	申请日期	2001.01.31
申请人	TOKYO OHKA KOGYO CO., LTD.	发明人	NITTA, KAZUYUKI;NAKAO, TAKU;MAEMORI, SATOSHI;MATSUMI, TATSUYA
分类号	G03F7/38;H01L21/027;G03F7/004;G03F7/40	主分类号	G03F7/38
代理机构		代理人
主权项
地址

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