MANUFACTURING METHOD OF SAMPLE FOR TEM ANALYSIS

摘要

PURPOSE: A method of manufacturing specimen for a transparent electronic microscope is provided to enable a specimen to be analyzed on a wide area with the transparent electronic microscope since the thickness of the specimen is wholly uniform in cross section. CONSTITUTION: A method of manufacturing specimen for a transparent electronic microscope is as follows. Both sides of a specimen are formed by removing a sample from both areas of the specimen comprising a target part using ion beams in a state the target part of the surface of a sample is placed perpendicular to the ion beams(S1). Both sides of the specimen are in turn inclined to the direction of the ion beam and are removed by the ion beams(S2). Some of the connecting part of the specimen and the sample is removed(S3). The end of the probe of a lifting system is attached to the specimen.