<p>Capacitive micromachined ultrasonic transducer ("CMUT") devices and fabrication methods are provided. The CMUT devices can include integrated circuit devices utilizing direct connections to various CMOS electronic components. The use of integrated connections can reduce overall package size and improve functionality for use in ultrasonic imaging applications. CMUT devices can also be manufactured on multiple silicon chip layers with each layer connected utilizing through silicon vias (TSVs). External power connections can be provided if high biasing voltages are required. Forward and side looking CMUT arrays can be manufactured for use in a variety of ultrasound technologies.</p>
申请公布号
WO2011140082(A1)
申请公布日期
2011.11.10
申请号
WO2011US34989
申请日期
2011.05.03
申请人
GEORGIA TECH RESEARCH CORPORATION;DEGERTEKIN, LEVENT, F.;GURUN, GOKCE;ZAHORIAN, JAIME;HOCHMAN, MICHAEL
发明人
DEGERTEKIN, LEVENT, F.;GURUN, GOKCE;ZAHORIAN, JAIME;HOCHMAN, MICHAEL