| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a vibration piece which is improved in Q value, and a vibrator and an oscillator which use the same, or an electronic apparatus which uses the same. <P>SOLUTION: Excitation electrodes each comprising a stack formed by stacking a first electrode 20, a piezoelectric film 22, and a second electrode 26 in this order are formed on first surfaces 12 of respective vibration arms 18a, 18b and 18c extended from one end portion of a base 16 of a vibration piece 1 in parallel. Members 30 made of materials which are insulating materials and have lower thermal resistivity than crystal as forming materials of at least the vibration arms 18a, 18b and 18c and the base 16 are formed covering the entire regions of the vibration arms 18a, 18b and 18c where the second electrodes 26 are formed, and the base 16 nearby roots of the respective vibration arms 18a,18b and 18c for the base 16, and also leaving gaps so as to make the respective vibration arms 18a, 18b and 18c thermally independent. <P>COPYRIGHT: (C)2012,JPO&INPIT |
