| 摘要 |
An apparatus and a method of fabricating a thin film pattern, capable of forming a demolding seed between an imprinting mold and a substrate in a demolding process of demolding an imprinting mold from a substrate, are disclosed. The method of fabricating a thin film pattern includes coating imprinting resin on the other region except an edge region of a substrate, forming a thin film pattern on the substrate by contacting an imprinting mold with the imprinting resin, and demolding the imprinting mold from the substrate. |
