发明名称 |
Method for forming periodic structure |
摘要 |
A method for forming a periodic structure is disclosed. A structural layer and an optical modulation element are provided. A light is emitted to pass through the optical modulation element to irradiate interference strips on the structural layer. A photoelectrochemical etching (PEC) is performed to form the periodic structure according the interference strips irradiated on the structural layer.
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申请公布号 |
US8052883(B2) |
申请公布日期 |
2011.11.08 |
申请号 |
US20080115998 |
申请日期 |
2008.05.06 |
申请人 |
NATIONAL TAIWAN UNIVERSITY |
发明人 |
YANG CHIH-CHUNG;CHEN CHENG-YEN;LIN CHENG-HUNG;YEH DONG-MING |
分类号 |
B29D11/00 |
主分类号 |
B29D11/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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