THIN FILM DEPOSITION APPARATUS AND METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY DEVICE BY USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a thin film deposition apparatus that is easily applied to the mass production process of large-sized display devices and has improved manufacturing yield, and to provide a method of manufacturing an organic light-emitting display device by using the thin film deposition apparatus.

SOLUTION: The thin film deposition apparatus includes: a loading unit to fix a substrate for vapor deposition by an electrostatic chuck; a vapor deposition unit which includes a chamber and a thin film vapor deposition assembly 100 disposed in the chamber and for performing the vapor deposition of a thin film on a substrate 500 fixed to an electrostatic chuck; an unloading unit to separate the substrate on which deposition is completed from the electrostatic chuck; and a first circulation unit 610 to sequentially move the electrostatic chuck having the substrate fixed thereto to the loading unit, to the vapor deposition unit, and finally, to the unloading unit. The first circulation unit includes: one pair of first guide rails 613 and one pair of second guide rails 617 disposed in parallel to each other; at least one first guide block 615 engaged with the first guide rails; and at least one second guide block 619 engaged with the second guide rails.

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