发明名称 METHOD AND DEVICE FOR ELECTRICAL POTENTIAL DISTRIBUTION MEASUREMENT
摘要 <P>PROBLEM TO BE SOLVED: To provide a method and a device which enable accurate measurement of electrical potential distribution on a surface of a sample without being affected by a projection or depression structure of several microns or more or large electrical potential difference in the measurement of surface electrical potential distribution of the sample using a scanning probe microscope such as a KFM or an SMM even when the sample is located in solution or the sample contains solution. <P>SOLUTION: A measurement sample 6 is placed between an opposite electrode 7 and an insulating film 2 facing each other through a pedestal 5 so that the measurement sample 6 is in contact with the insulating film 2. The surface electrical potential distribution of the measurement sample is indirectly measured by measuring the surface electrical potential distribution of the insulating film using a probe 1 of a scanning probe microscope. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2011220925(A) 申请公布日期 2011.11.04
申请号 JP20100092213 申请日期 2010.04.13
申请人 CANON INC 发明人 SUGAWA ETSUKO
分类号 G01Q60/30;G01Q30/14;G01Q30/20;G01R29/12;G01R29/24 主分类号 G01Q60/30
代理机构 代理人
主权项
地址