发明名称 |
Method of transcribing fine pattern and fine structure pattern transcription apparatus |
摘要 |
A method of transcribing a shape of a surface of a stamper on a transcription surface of a transcription object by pressing the stamper on the transcription object, which comprises steps of: having one of the stamper and the transcription object positioned opposite a plate surface and the other of the stamper and the transcription object placed on one surface of a pressure plate; and having the one of the stamper and the transcription object pressed onto the plate surface by applying a fluid on the other surface of the pressure plate, wherein an area of the one surface of the pressure plate is larger than a contact area in which the other of the stamper and the transcription object is in contact with the pressure plate.
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申请公布号 |
US8047835(B2) |
申请公布日期 |
2011.11.01 |
申请号 |
US20070736016 |
申请日期 |
2007.04.17 |
申请人 |
HITACHI HIGH-TECHNOLOGIES CORPORATION |
发明人 |
HASEGAWA MITSURU;OGINO MASAHIKO;ANDO TAKASHI;KATAHO HIDEAKI |
分类号 |
B29C43/02;B29C35/08;B81C99/00 |
主分类号 |
B29C43/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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