发明名称 TREATMENT OF THIN FILM LAYERS PHOTOVOLTAIC MODULE MANUFACTURE
摘要 Systems and processes for treatment of a cadmium telluride thin film photovoltaic device are generally provided. The systems can include a treatment system and a conveyor system. The treatment system includes a preheating section, a treatment chamber, and an anneal oven that are integrally interconnected within the treatment system. The conveyor system is operably disposed within the treatment system and configured for transporting substrates in a serial arrangement into and through the preheat section, into and through the treatment chamber, and into and through the anneal oven at a controlled speed. The treatment chamber is configured for applying a material to a thin film on a surface of the substrate and the anneal oven is configured to heat the substrate to an annealing temperature as the substrates are continuously conveyed by the conveyor system through the treatment chamber.
申请公布号 US2011263070(A1) 申请公布日期 2011.10.27
申请号 US20100766135 申请日期 2010.04.23
申请人 PRIMESTAR SOLAR, INC. 发明人 SCHAEFFER CORY ALLEN;MURPHY BRIAN ROBERT
分类号 H01L31/18;H01L21/06 主分类号 H01L31/18
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