METHOD FOR COATING ADHESIVE ON INNER WALL OF AIR HOLE IN PELLICLE FRAME

摘要

PROBLEM TO BE SOLVED: To provide a method for applying an adhesive to an inner wall of a vent hole of a pellicle frame, capable of producing uniform coating without polluting environment.SOLUTION: A method for applying an adhesive to an inner wall of a vent hole of a pellicle frame comprises holding the pellicle frame having a vent hole so as to position an outer side of the frame horizontally or at an incline of 45 degrees or less, and dripping the adhesive diluted with an organic solvent to 10 wt% or less into the vent hole. The organic solvent comprises a mixed solvent of ethyl acetate and hexane having a mixture ratio in the range from 3:7 to 5:5.