APPARATUS AND METHOD TREATING A SUBSTRATE,申请号KR20100035901-传众专利搜索

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发明名称	APPARATUS AND METHOD TREATING A SUBSTRATE
摘要
申请公布号	KR20110116469(A)	申请公布日期	2011.10.26
申请号	KR20100035901	申请日期	2010.04.19
申请人	SEMES CO., LTD.	发明人	CHO, WON PIL;NOH, HWAN IK;PARK, GUI SU;KANG, BYUNG CHUL
分类号	H01L21/306	主分类号	H01L21/306
代理机构		代理人
主权项
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