APPARATUS FOR MEASURING INTERFERENCE OF THICKNESS OR TEMPERATURE

摘要

PROBLEM TO BE SOLVED: To accurately measure a thickness and a temperature of a measurement object with no contact therewith.SOLUTION: An interference measuring apparatus includes a light source 10 for radiating supercontinuum light; an optical fiber coupler 11 for splitting the SC light into measuring light and reference light; a mirror 12; a position adjustment device 13 for adjusting a position of the mirror 12; a light receiving device 14 measuring a wavelength spectrum of the interference intensity of the measuring light with the reference light; and an interference waveform analyzer 15 for obtaining a spatial distribution of interference intensity by the inverse Fourier transform of the spectrum of the interference intensity into spatial coordinates and measuring the thickness and the temperature of the measurement object based on the spatial distribution.