| 摘要 |
PROBLEM TO BE SOLVED: To provide an ultraviolet ray gas laser apparatus, capable of preventing a predetermined gas component included in leaked laser gas from flowing into a casing of the ultraviolet ray gas laser apparatus, even when the laser gas leaks from a window of a laser chamber.SOLUTION: The ultraviolet ray gas laser apparatus includes a container, a purge circuit having a circuit that supplies purge gas into the container and a circuit for discharging the purge gas in the container, and a laser gas exhaust circuit for discharging the laser gas in the laser chamber. The purge circuit has a filter. The laser gas exhaust circuit is provided with a filter that captures the predetermined gas component separately from the filter of the purge circuit. |
