发明名称 Method and apparatus for inspecting slider using moving stage
摘要 A method for inspecting a slider having a substantially rectangular parallelepiped shape is provided. The method has: a lifting step of lifting said slider upward and stopping said slider at an inspecting position while supporting said slider at an undersurface of said slider, wherein said undersurface is a surface that is other than a first surface, said first surface being an air bearing surface or a surface that is to be formed in said air bearing surface; and an inspection step of simultaneously inspecting said first surface and a second surface of said slider, said second surface being a surface that is other than said first surface and said undersurface, wherein said first surface is inspected by a first camera and said second surface is inspected by a second camera, said first and second cameras being arranged in advance such that an optical axis thereof passes through said inspecting position.
申请公布号 US8040375(B2) 申请公布日期 2011.10.18
申请号 US20070819032 申请日期 2007.06.25
申请人 SAE MAGNETICS (H.K.) LTD. 发明人 FUJII RYUJI
分类号 G01N21/00 主分类号 G01N21/00
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