发明名称 Method for manufacturing N-type and P-type chalcogenide material, doped homojunction chalcogenide thin film transistor and method of fabricating the same
摘要 The present invention provides a doped homojunction chalcogenide thin film transistor and a method of fabricating the same, comprising forming an N-type chalcogenide layer constituting a channel layer on a substrate, forming and patterning a diffusion prevention layer on the upper part of the N-type chalcogenide layer, and forming a P-type chalcogenide layer constituting source and drain regions by depositing and diffusing Te alloy on the N-type chalcogenide layer. With the present invention, a thin film transistor can be fabricated using chalcogenide material having N-type conductivity and chalcogenide material having P-type conductivity.
申请公布号 US8039926(B2) 申请公布日期 2011.10.18
申请号 US20080328933 申请日期 2008.12.05
申请人 ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE 发明人 SONG KIBONG;LEE SANGSU
分类号 H01L29/12 主分类号 H01L29/12
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