| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a piezoelectric film, which is capable of manufacturing the piezoelectric film which is environmentally friendly and has a high dielectric constant; a piezoelectric element; a liquid ejection head; and a liquid ejection device.SOLUTION: The manufacturing method includes: a step for forming a piezoelectric precursor film by using a precursor solution containing a metal compound containing Bi, Fe, Mn, Ba and Ti; and a step for obtaining the piezoelectric film preferentially oriented with a (110) plane by heating the piezoelectric precursor film to crystallize it. |
