| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of an oxide superconducting thin film capable of obtaining a temporarily baked film with generation of remains of foaming restrained in a temporarily baking treatment process, and capable of obtaining an oxide superconducting thin film having excellent superconductivity in a baking treatment process after the temporarily baking treatment process.SOLUTION: The manufacturing method of the oxide superconducting thin film, which is used for manufacturing superconducting wire rods, with a metal organic compound used as a raw material, and manufactured by the coating pyrolysis method, includes a coating film manufacturing process for manufacturing a coating film by applying solution of a metal organic compound on a substrate, a temporarily baking treatment process for manufacturing a temporarily baked film by pyrolizing and removing organic components contained in the metal organic compound of the coating film, and a baking treatment process for manufacturing the oxide superconducting thin film by crystallizing the temporarily baked film. The temporarily baked treatment process is carried out under an oxygen-free atmosphere or atmosphere with low oxygen concentration. |
