发明名称 Semiconductor device and electronic apparatus
摘要 A semiconductor device includes: a substrate having a first surface; an insulation layer; a semiconductor layer disposed to the first surface of the substrate with the insulation layer interposed between the semiconductor layer and the first surface; and a piezoelectric layer that is positioned between the first surface and the semiconductor layer, and disposed in a region included and interposed in the insulation layer.
申请公布号 US8035164(B2) 申请公布日期 2011.10.11
申请号 US20080249520 申请日期 2008.10.10
申请人 SEIKO EPSON CORPORATION 发明人 KATO TATSUSHI
分类号 H01L21/70 主分类号 H01L21/70
代理机构 代理人
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