发明名称 DROPLET JETTING HEAD, METHOD FOR MANUFACTURING THE SAME, AND DROPLET JETTING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a droplet jetting head which attains a favorable displacement amount, and a droplet jetting device having the droplet jetting head.SOLUTION: The droplet jetting head 1000 includes: a substrate 20 having a pressure chamber 20a; a piezoelectric element 30 which is formed on the substrate 20, and has a first electrode 10, a second electrode 14, and a piezoelectric substance layer 12 which is disposed between the first electrode 10 and the second electrode 14, and composed of a lead zirconate titanate-based ferroelectric substance; and a nozzle plate 28 having a nozzle hole 28a continuous to the pressure chamber 20a. The first electrode 10 has a nickel acid lanthanum layer having nickel acid lanthanum as a principal component at least at the piezoelectric substance layer side, the piezoelectric substance layer 12 has a distribution in which lanthanum and nickel are decreased from an interface between a nickel acid lanthanum layer 10b and the piezoelectric substance layer 12 toward the second electrode 14, lanthanum is distributed in part of the piezoelectric substance layer 12, nickel is distributed so as to have a plurality of peaks in the entire piezoelectric substance layer 12, and at least the one peak has a divided state.
申请公布号 JP2011198927(A) 申请公布日期 2011.10.06
申请号 JP20100062634 申请日期 2010.03.18
申请人 SEIKO EPSON CORP 发明人 OHASHI KOJI
分类号 H01L41/09;B41J2/045;B41J2/055;B41J2/135;B41J2/14;H01L41/18;H01L41/187;H01L41/22;H01L41/29;H01L41/39 主分类号 H01L41/09
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