HEAT TREATMENT APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a heat treatment apparatus that has a temperature detection means installed outside a reaction chamber so as to prevent a process gas from contacting the temperature detection means to form a film and improve reliability and reproduction of a measurement value of the temperature detection means.SOLUTION: The heat treatment apparatus for growing single crystalline films or polycrystalline films on a plurality of substrates includes: a boat configured to hold the plurality of substrates; a cylindrical heat generating material 23 installed to surround the boat and constituting the reaction chamber 32; a reaction tube 21 installed to surround the cylindrical heat generating material; a cylindrical insulating part 25 installed between the cylindrical heat generating material and the reaction tube; a temperature measurement chip 24 installed between the cylindrical heat generating material and the cylindrical insulating part; and a radiation thermometer 42 configured to measure a temperature of the temperature measurement chip, wherein the radiation thermometer is disposed below a lower end of the reaction tube.