Method and apparatus for elimination of high energy ions from EUV radiating device,申请号EP20020257391-传众专利搜索

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发明名称	Method and apparatus for elimination of high energy ions from EUV radiating device
摘要
申请公布号	EP1309234(B1)	申请公布日期	2011.10.05
申请号	EP20020257391	申请日期	2002.10.24
申请人	NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCEAND TECHNOLOGY	发明人	YASHIRO, HIDEHIKO
分类号	G01N23/227;H05G2/00;G03F7/20;G21K1/00;G21K5/00;G21K5/02;G21K5/08;H01L21/027;H05G1/00	主分类号	G01N23/227
代理机构		代理人
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地址

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