发明名称 |
System and method for using first-principles simulation to facilitate a semiconductor manufacturing process |
摘要 |
A method, system and computer readable medium for facilitating a process performed by a semiconductor processing tool. The method includes inputting data relating to a process performed by the semiconductor processing tool and inputting a first principles physical model relating to the semiconductor processing tool. First principles simulation is then performed using the input data and the physical model to provide a first principles simulation result, and the first principles simulation result is used to facilitate the process performed by the semiconductor processing tool.
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申请公布号 |
US8032348(B2) |
申请公布日期 |
2011.10.04 |
申请号 |
US20030673138 |
申请日期 |
2003.09.30 |
申请人 |
TOKYO ELECTRON LIMITED |
发明人 |
MITROVIC ANDREJ S.;STRANG ERIC J. |
分类号 |
G06F17/50;G06F19/00;G06G7/48;H01L;H01L21/00 |
主分类号 |
G06F17/50 |
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