发明名称 |
PLATING SOLUTION FOR ELECTROLESS DEPOSITION OF COPPER |
摘要 |
AN ELECTROLESS COPPER PLATING SOLUTION IS DISCLOSED HEREIN. THE SOLUTION INCLUDES AN AQUEOUS COPPER SALT COMPONENT, AN AQUEOUS COBALT SALT COMPONENT, A TRIAMINE BASED COMPLEXING AGENT, AND AN ACIDIC PH-MODIFYING SUBSTANCE IN AN AMOUNT SUFFICIENT TO MAKE THE ELECTROLESS COPPER PLATING SOLUTION ACIDIC. A METHOD OF PREPARING AN ELECTROLESS TO COPPER SOLUTION IS ALSO PROVIDED.
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申请公布号 |
MY144454(A) |
申请公布日期 |
2011.09.30 |
申请号 |
MYPI20084533 |
申请日期 |
2007.05.10 |
申请人 |
LAM RESEARCH CORPORATION |
发明人 |
VASKELIS, ALGIRDAS;NORKUS, EUGENIJUS;JACIAUSKIENE, JANE;JAGMINIENE, ALDONA |
分类号 |
C23C18/38 |
主分类号 |
C23C18/38 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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