发明名称 PLATING SOLUTION FOR ELECTROLESS DEPOSITION OF COPPER
摘要 AN ELECTROLESS COPPER PLATING SOLUTION IS DISCLOSED HEREIN. THE SOLUTION INCLUDES AN AQUEOUS COPPER SALT COMPONENT, AN AQUEOUS COBALT SALT COMPONENT, A TRIAMINE BASED COMPLEXING AGENT, AND AN ACIDIC PH-MODIFYING SUBSTANCE IN AN AMOUNT SUFFICIENT TO MAKE THE ELECTROLESS COPPER PLATING SOLUTION ACIDIC. A METHOD OF PREPARING AN ELECTROLESS TO COPPER SOLUTION IS ALSO PROVIDED.
申请公布号 MY144454(A) 申请公布日期 2011.09.30
申请号 MYPI20084533 申请日期 2007.05.10
申请人 LAM RESEARCH CORPORATION 发明人 VASKELIS, ALGIRDAS;NORKUS, EUGENIJUS;JACIAUSKIENE, JANE;JAGMINIENE, ALDONA
分类号 C23C18/38 主分类号 C23C18/38
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