发明名称 MICROPHONE UNIT AND VOICE INPUT DEVICE USING SAME
摘要 A microphone unit converts voice into an electric signal based on the vibration of a diaphragm contained in an MEMS chip. The microphone unit includes a substrate on which the diaphragm is mounted (the MEMS chip is mounted); a cover member, having sound holes, that is disposed above the substrate so that the diaphragm is contained within the inner space formed between the cover member and the substrate; and a holding member that holds only the substrate or both of the substrate and the cover member.
申请公布号 US2011233692(A1) 申请公布日期 2011.09.29
申请号 US200913133515 申请日期 2009.12.10
申请人 INODA TAKESHI;HORIBE RYUSUKE;TANAKA FUMINORI;FUNATSU AKIRA;SHIBUTANI MICHITOMO 发明人 INODA TAKESHI;HORIBE RYUSUKE;TANAKA FUMINORI;FUNATSU AKIRA;SHIBUTANI MICHITOMO
分类号 H01L29/84 主分类号 H01L29/84
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