| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface quality evaluation method of a metal which considers a distribution of a thickness of an oxide film formed on a surface, and automatically evaluates the quality of the metal . SOLUTION: The surface quality evaluation method of the metal comprises: an imaging process S1 for capturing an image on the surface of an object to be inspected, and obtaining color component information on a plurality of pixels included in the image; the film thickness determining process S2 for comparing a correspondence relationship between a trajectory at a position in a color space caused by the color component information on the pixel included in the image on the previously-measured metal surface and the thickness of the oxide film at a position at which the color component information on the metal surface is obtained with the position of the color component information in the color space, and obtaining the thickness of the oxide film corresponding to the pixel; a feature quantity determining process S3 for obtaining a specific feature quantity corresponding to thicknesses of a plurality of the oxide films; and a non-defective product evaluating process S4 for comparing the feature quantity of the metal as the previously-measured non-defective product/defective product with the specific feature quantity obtained in the feature quantity determining process by mechanical learning, and evaluating whether the object to be inspected is the non-defective product or the defective product. COPYRIGHT: (C)2011,JPO&INPIT
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