发明名称 GRINDING DEVICE AND GRINDING METHOD
摘要 PROBLEM TO BE SOLVED: To perform dressing work by always allowing a dresser board to abut under substantially equal pressure on a grinding surface of a grinding wheel in parallel to grinding work. SOLUTION: A positioning mechanism 11 for constituting a dressing means 1 positions the dresser board 8 held by a holding table 10 in a predetermined position Z2 above a holding surface 20 of a chuck table 2, and performs dressing of the grinding wheel 310 in a state of pressing the holding table 10 from below by a pressing member 13 interposed between the holding table 10 and the positioning mechanism 11, and regulates rocking of the holding table 10 in the horizontal direction by a regulating member 12, and can thereby perform grinding of a workpiece W in parallel to dressing by allowing the dresser board 8 to abut on the grinding surface 310a of the grinding wheel 310 with a simple constitution. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011189456(A) 申请公布日期 2011.09.29
申请号 JP20100057332 申请日期 2010.03.15
申请人 DISCO CORP 发明人 MIURA OSAMU
分类号 B24B53/12;B24B53/02 主分类号 B24B53/12
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