| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a gas separator for supplying a high purity gas, while attaining the saving of a space for installation of the gas separator, as well as a gas separation method. <P>SOLUTION: This gas separator comprises a compressor for compressing the air, an aftercooler for cooling the air compressed by a compressor, a dryer for dehumidifying the air cooled by the aftercooler and an air tank for storing the compressed air dehumidified by the dryer. In addition, a predetermined gas is separated from the air stored in the air tank, and an exhaust generated during gas separation is supplied to the aftercooler. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
