发明名称 |
SHAPE RECOGNITION APPARATUS |
摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a shape recognition apparatus for clearly identifying a contour even if a plate-like object includes a transparent body. <P>SOLUTION: The shape recognition apparatus 6 for detecting the contour of the plate-like object 10 includes: a holding table 3 for holding the plate-like object 10; an imaging means 61 held on the holding table 3, and imaging the plate-like object 10; an illumination means 62 disposed under the imaging means 61; and a shielding means 63 for shielding a positive reflection light in an area imaged by the imaging means 61 among a reflection light reflected from the plate-like object 10 irradiated by the illumination means 62 and held on the holding table 3. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
申请公布号 |
JP2011185694(A) |
申请公布日期 |
2011.09.22 |
申请号 |
JP20100050174 |
申请日期 |
2010.03.08 |
申请人 |
DISCO CORP |
发明人 |
NOMARU KEIJI;SAWABE DAIKI;HATA YUDAI |
分类号 |
G01B11/24;B23K26/03;B23K26/10;H01L21/301;H01L21/68 |
主分类号 |
G01B11/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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