发明名称 SEMICONDUCTOR DEVICE, DETECTION METHOD, AND PROGRAM
摘要 Disclosed is a semiconductor device and the like that can determine the performance of a semiconductor integrated circuit with a higher precision even when the testing environment fluctuates. The semiconductor device can detect degradation arising in the semiconductor integrated circuit, and is provided with: a measurement means that measures temperature and voltage; a determination means that distinguishes whether or not the contents of a test are executed within an allowable test timing in a circuit unit undergoing detection at each test operation frequency, and determines the maximum executed test operation frequency; and a calculation means that converts the maximum test operation frequency to a maximum test operation frequency at a baseline temperature and a baseline voltage, and calculates the amount of degradation, which represents the state of degradation. The semiconductor integrated circuit has a monitoring block circuit that monitors the values that are for the measurement means to measure the value of the temperature and voltage. The measurement means has an estimation means that estimates the value of the temperature and voltage of the circuit unit undergoing detection from the value monitored by the monitoring block circuit. The calculation means uses the value of the temperature and voltage that the estimation means estimated.
申请公布号 WO2011115038(A1) 申请公布日期 2011.09.22
申请号 WO2011JP55900 申请日期 2011.03.14
申请人 KYUSHU INSTITUTE OF TECHNOLOGY;NATIONAL UNIVERSITY CORPORATION NARA INSTITUTE OFSCIENCE AND TECHNOLOGY;TOKYO METROPOLITAN UNIVERSITY;SATO YASUO;KAJIHARA SEIJI;INOUE MICHIKO;YONEDA TOMOKAZU;YI HYUNBEAN;MIURA YUKIYA 发明人 SATO YASUO;KAJIHARA SEIJI;INOUE MICHIKO;YONEDA TOMOKAZU;YI HYUNBEAN;MIURA YUKIYA
分类号 G01R31/28;H01L21/822;H01L27/04 主分类号 G01R31/28
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