| 摘要 |
PROBLEM TO BE SOLVED: To provide an ESD organic EL device and a method for improving a film forming rate into a large area by adjusting distances between a processed object and each nozzle part. SOLUTION: Voltage is applied to a solution in which an organic material is solved, and spray liquid having charges generated by the application is sprayed toward the processed object. In application between the processed object and a mounting part mounting it, the plurality of nozzle parts having the solution and spray openings are used for spraying operation. The volatilization of solvent is promoted. COPYRIGHT: (C)2011,JPO&INPIT
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