发明名称 SYSTEM AND METHOD FOR FABRICATING A FIN FIELD EFFECT TRANSISTOR
摘要 <p>There is provided fin methods for fabricating fin structures. More specifically, fin structures are formed in a substrate. The fin structures may include two fins separated by a channel, wherein the fins may be employed as fins of a field effect transistor. The fin structures are formed below the upper surface of the substrate, and may be formed without utilizing a photolithographic mask to etch the fins.</p>
申请公布号 KR101064467(B1) 申请公布日期 2011.09.15
申请号 KR20097003577 申请日期 2007.08.07
申请人 发明人
分类号 H01L21/336;H01L29/78 主分类号 H01L21/336
代理机构 代理人
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