发明名称 DICING DIE-BONDING FILM
摘要 A dicing die-bonding film with excellent peeling property when a diced semiconductor chip and its die-bonding film are, without deteriorating a holding force during dicing a semiconductor wafer even if it is thin. A dicing die-bonding film, comprising a dicing film having at least a pressure-sensitive adhesive layer formed on a supporting base material, and a die-bonding film formed on the pressure-sensitive adhesive layer, wherein the thickness of the pressure-sensitive adhesive layer is 5 to 80 μm, and when the dicing film is peeled off from the die-bonding film after dicing from the side of the die-bonding film to a part of the pressure-sensitive adhesive layer, the maximum value of a peeling force in the vicinity of the cut surface is 0.7 N/10 mm or less under the conditions of a temperature of 23° C., a peeling angle of 180°, and a peeling point moving rate of 10 mm/min.
申请公布号 KR20110101102(A) 申请公布日期 2011.09.15
申请号 KR20110020045 申请日期 2011.03.07
申请人 NITTO DENKO CORPORATION 发明人 SHISHIDO YUICHIRO;MATSUMURA TAKESHI;MURATA SHUHEI
分类号 H01L21/48 主分类号 H01L21/48
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