| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a fine structure in which optical nano imprinting at a room temperature is performed and which produces the fine structure with ease by combining an optical curing composition with excellent solvent dissolving properties of a curing object and a lift-off method, and also to provide a fine structure having an excellent pattern obtained by the manufacturing method, and a hard disk, a grating, a semiconductor material, a material for producing an MEMS, a hologram, a waveguide, a plasmon device, and a polarizing plate or a polarization film, each consisting of the fine structure. <P>SOLUTION: A method of manufacturing a fine structure produces a fine structure by the lift-off method using an optical curing composition in which a curing object can be dissolved in solvent. The optical curing composition contains a polymerizable monomer, and 90 wt.% or more of the polymerizable monomer is one or more kinds of single function radical polymerization monomer. The glass transition point of the one or more kinds of single function radical polymerization monomer is 25°C or more. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
