| 摘要 |
<P>PROBLEM TO BE SOLVED: To efficiently establish a substantial matching state in a short period of time without causing unnecessary speed reduction or hatching in automatic operation. <P>SOLUTION: In a second matching algorithm, an operating point Z<SB>p</SB>is moved along e.g., a route Z<SB>p</SB>(7), Z<SB>p</SB>(8), and Z<SB>p</SB>(9) on a C<SB>1</SB>coordinates axis or C<SB>2</SB>coordinates axis, based on a third reference line TC<SB>1S</SB>or TC<SB>2S</SB>perpendicular to a first or second reference line C<SB>1S</SB>or C<SB>2S</SB>as a target of operating point movement control on impedance coordinates. The coordinates position of the operating point Z<SB>p</SB>(9) reaches an available best quasi-matching point Z<SB>B</SB>extremely close to the origin O (the matching point Z<SB>S</SB>), and the movement of the operating point Z<SB>p</SB>is stopped at this position. <P>COPYRIGHT: (C)2011,JPO&INPIT |
