| 摘要 |
PROBLEM TO BE SOLVED: To improve the quality of the crystal in a method and an apparatus for producing a nitride crystal. SOLUTION: The method for producing a nitride crystal includes a preparation step and a subsequent step of growing the crystal. The preparation step includes a first step of housing a seed substrate, metallic gallium and sodium, which are crystal raw materials, in a crucible. The step of growing the crystal includes a second step of growing the crystal on the seed substrate in such a state that the crucible is arranged in a crystal growth vessel, and the furnace core tube is heated at a predetermined temperature by a heating means while the crystal growth vessel is disposed in the furnace core tube, and the crucible is placed under a nitrogen atmosphere at a predetermined air pressure by a raw material gas supply means. COPYRIGHT: (C)2011,JPO&INPIT |
