| 摘要 |
PROBLEM TO BE SOLVED: To provide an image reading device having a shading correcting function, capable of suitably performing shading correction. SOLUTION: The image reading device for reading image information on a substrate W performs shading correction to an electric signal obtained by reading the substrate W by a shading correction unit 512. The shading correction unit 512 includes a data generation unit 514 which generates a plurality of correction signal data by a diffusive function having substantially the same level of light diffusion as that of the substrate W from a common standard electric signal E1. Since a shading correction factor can be generated as needed, the shading correction can be accurately performed to secure satisfactory image quality. COPYRIGHT: (C)2011,JPO&INPIT
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