| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for measuring a shape of a wet film applied on a substrate accurately and promptly to achieve an even film, and to provide a method for calculating application amount and accurately giving a feedback to application device. SOLUTION: In the method for manufacturing an organic EL display device, a functional liquid (ink) where a luminescent material is dissolved as solvent is applied to the substrate, and then the functional liquid is dried and a luminescent layer is formed. There are the following steps: a step of measuring the shape of a functional liquid solution applied to the substrate, and determining the amount of the functional liquid solution after the liquid solution is applied to the substrate and before the liquid solution is dried; and a step of adjusting the amount of the functional liquid solution to be applied subsequently when the determined amount of the liquid solution is different form a predetermined one. Moreover, a method for measuring the shape of the functional liquid solution film is a contactless measurement by a spicular measurement terminal, by which a fluorine-containing surface is scanned right before a portion of the functional liquid. COPYRIGHT: (C)2011,JPO&INPIT
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