THIN-FILM THERMISTOR ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide a thin-film thermistor element in which high response characteristics can be obtained and on which a protective coating having good contact with a metal-system electrode material is formed. SOLUTION: The thin-film thermistor element includes: an alumina substrate 3; a thermistor thin film 4 formed of a thermistor material on the alumina substrate 3; a pair of comb-shaped electrodes 5 formed on the thermistor thin film 4; and the protective coating 6 covering at least part of the comb-shaped electrodes 5 and the thermistor thin film 4 and formed of hafnium oxide or hafnium metal oxide. COPYRIGHT: (C)2011,JPO&INPIT